Xiav / ntsuab LED epitaxy los ntawm semicera muab cov kev daws teeb meem rau kev ua haujlwm siab LED. Tsim los txhawb cov txheej txheem kev loj hlob ntawm epitaxial siab, semicera's Blue / ntsuab LED epitaxy thev naus laus zis txhim kho kev ua tau zoo thiab qhov tseeb hauv kev tsim cov xiav thiab ntsuab LEDs, tseem ceeb rau ntau yam kev siv optoelectronic. Siv lub xeev-ntawm-tus-kos duab Si Epitaxy thiab SiC Epitaxy, cov tshuaj no ua kom zoo zoo thiab kav ntev.
Hauv cov txheej txheem tsim khoom, MOCVD Susceptor ua lub luag haujlwm tseem ceeb, nrog rau cov khoom xws li PSS Etching Carrier, ICP Etching Carrier, thiab RTP Carrier, uas ua kom zoo dua qhov chaw loj hlob ntawm epitaxial. Semicera's Blue/green LED epitaxy yog tsim los muab kev txhawb nqa ruaj khov rau LED Epitaxial Susceptor, Barrel Susceptor, thiab Monocrystalline Silicon, ua kom cov khoom tsim tau zoo ib yam, cov txiaj ntsig zoo.
Cov txheej txheem epitaxy no tseem ceeb heev rau kev tsim cov khoom siv hluav taws xob Photovoltaic thiab txhawb cov ntawv thov xws li GaN ntawm SiC Epitaxy, txhim kho tag nrho cov khoom siv hluav taws xob. Txawm hais tias nyob rau hauv Pancake Susceptor configuration los yog siv nyob rau hauv lwm yam advanced setups, semicera's Blue / ntsuab LED epitaxy dlaws muaj kev txhim khu kev qha kev ua tau zoo, pab manufacturers ua tau raws li qhov loj hlob thov rau high-zoo LED Cheebtsam.
Cov yam ntxwv tseem ceeb:
1. Kub oxidation kuj:
oxidation kuj tseem zoo heev thaum kub siab li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.
Main Specifications ntawmCVD-SIC txheej
| SiC-CVD Properties | ||
| Crystal Structure | FCC β theem | |
| Qhov ntom | g / cm³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Loj Loj | ib m | 2 ~ 10 |
| Tshuaj Purity | % | 99.999 5 |
| Thaum tshav kub kub muaj peev xwm | J·kg-1 · K-1 | 640 |
| Sublimation kub | ℃ | 2700 ib |
| Felexural zog | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt khoov, 1300 ℃) | 430 |
| Thermal Expansion (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W / mK) | 300 |
