LED etch Silicon carbide bearing tais, ICP tais (Etch)

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Semicera Energy Technology Co., Ltd. yog ib lub chaw muag khoom tshwj xeeb hauv wafer thiab qib siab semiconductor consumables.Peb mob siab rau muab cov khoom lag luam zoo, txhim khu kev qha, thiab cov khoom tshiab rau kev tsim khoom semiconductor,photovoltaic kev lag luamthiab lwm yam kev lag luam.

Peb cov khoom lag luam suav nrog SiC / TaC coated graphite cov khoom thiab cov khoom siv ceramic, suav nrog ntau yam ntaub ntawv xws li silicon carbide, silicon nitride, thiab txhuas oxide thiab lwm yam.

Raws li ib tus neeg muab kev ntseeg siab, peb nkag siab qhov tseem ceeb ntawm cov khoom siv hauv kev tsim khoom, thiab peb tau cog lus tias yuav xa cov khoom uas ua tau raws li cov qauv zoo tshaj plaws kom ua tiav peb cov neeg siv khoom xav tau.

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Product Detail

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Product Description

Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej.

Cov yam ntxwv tseem ceeb:

1. Kub kub oxidation tsis kam:

oxidation kuj tseem zoo heev thaum kub siab li 1600 C.

2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.

3. Erosion kuj: siab hardness, compact nto, zoo hais.

4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.

Main Specifications ntawm CVD-SIC txheej

SiC-CVD Properties
Crystal Structure	FCC β theem
Qhov ntom	g / cm³	3.21
Hardness	Vickers hardness	2500
Loj Loj	ua m	2 ~ 10
Tshuaj Purity	%	99.999 5
Thaum tshav kub kub muaj peev xwm	J·kg-1 · K-1	640
Sublimation kub	℃	2700
Felexural zog	MPa (RT 4-point)	415
Young's Modulus	Gpa (4pt khoov, 1300 ℃)	430
Thermal Expansion (CTE)	10-6K-1	4.5
Thermal conductivity	(W / mK)	300