Cov Khoom Siv SiC Focus Ntiv Nplhaib los ntawm Semicera yog cov khoom siv txiav-ntug tsim los ua kom tau raws li qhov xav tau ntawm kev tsim khoom semiconductor siab heev. Ua los ntawm high-puritySilicon Carbide (SiC), lub nplhaib tsom iav no zoo tagnrho rau ntau yam kev siv hauv kev lag luam semiconductor, tshwj xeeb hauvCVD SiC cov txheej txheem, plasma etching, thiabICPRIE (Inductively Coupled Plasma Reactive Ion Etching). Paub txog nws qhov tshwj xeeb hnav tsis kam, siab thermal stability, thiab purity, nws ua kom muaj kev ua haujlwm ntev ntev hauv qhov chaw muaj kev ntxhov siab.
Hauv semiconductorwaferKev ua haujlwm, Khoom SiC Focus Rings yog qhov tseem ceeb hauv kev tswj xyuas qhov tseeb ntawm etching thaum qhuav etching thiab wafer etching daim ntaub ntawv. SiC tsom nplhaib pab tsom rau cov ntshav thaum lub sij hawm cov txheej txheem xws li ntshav etching tshuab ua hauj lwm, ua rau nws indispensable rau etching ntawm silicon wafers. Cov khoom siv SiC muaj qhov tsis sib xws los tiv thaiv kev yaig, ua kom lub neej ntev ntawm koj cov khoom siv thiab txo qis qis, uas yog qhov tseem ceeb rau kev tswj cov khoom siv hluav taws xob ntau hauv cov khoom siv hluav taws xob.
Cov Khoom Siv SiC Focus Ntiv Nplhaib los ntawm Semicera yog tsim los tiv thaiv qhov kub thiab txias thiab tshuaj lom neeg uas nquag ntsib hauv kev lag luam semiconductor. Nws yog tshwj xeeb crafted rau siv nyob rau hauv high-precision tej hauj lwm xws liCVD SiC coatings, qhov purity thiab durability yog qhov tseem ceeb. Nrog zoo heev tiv thaiv thermal shock, cov khoom no ua kom zoo ib yam thiab ruaj khov kev ua tau zoo nyob rau hauv lub harshest tej yam kev mob, nrog rau raug rau kub thaum lub sij hawm.waferetching txheej txheem.
Hauv cov ntawv thov semiconductor, qhov tseeb thiab kev ntseeg tau yog qhov tseem ceeb, Cov Khoom Siv SiC Focus Ring ua lub luag haujlwm tseem ceeb hauv kev txhim kho tag nrho cov txiaj ntsig ntawm cov txheej txheem etching. Nws cov qauv tsim muaj zog, kev ua haujlwm siab ua rau nws yog qhov kev xaiv zoo tshaj plaws rau kev lag luam uas xav tau cov khoom siv purity siab uas ua tau raws li qhov xwm txheej hnyav. Seb siv nyob rau hauvCVD SiC nplhaibdaim ntaub ntawv lossis ua ib feem ntawm cov txheej txheem plasma etching, Semicera's Solid SiC Focus Ring pab txhim kho koj cov cuab yeej kev ua tau zoo, muab lub neej ntev thiab kev ntseeg siab rau koj cov txheej txheem tsim khoom xav tau.
Cov yam ntxwv tseem ceeb:
• Superior hnav tsis kam thiab siab thermal stability
• High-purity Solid SiC cov khoom siv rau kev ua neej ntev
• Zoo tagnrho rau plasma etching, ICP RIE, thiab qhuav etching daim ntaub ntawv
• Zoo meej rau wafer etching, tshwj xeeb tshaj yog nyob rau hauv cov txheej txheem CVD SiC
• Txhim khu kev ua tau zoo nyob rau hauv ib puag ncig huab thiab kub kub
• Ua kom muaj tseeb thiab ua haujlwm zoo hauv etching ntawm silicon wafers
Daim ntawv thov:
• CVD SiC cov txheej txheem hauv kev tsim khoom semiconductor
• Plasma etching thiab ICP RIE systems
• Qhuav etching thiab wafer etching txheej txheem
• Etching thiab deposition hauv plasma etching tshuab
• Precision Cheebtsam rau wafer rings thiab CVD SiC rings
Microscopic morphology ntawm CVD SiC nto
Microscopic morphology ntawm CVD SiC hla ntu
