SiC Coated Susceptor Rau Deep UV-LED

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Semicera Energy Technology Co., Ltd. yog ib tug ua lag luam ntawm advanced semiconductor ceramics.Peb cov khoom tseem ceeb muaj xws li: Silicon carbide etched discs, silicon carbide nkoj trailer, silicon carbide wafer ships (PV & Semiconductor), silicon carbide furnace tubes, silicon carbide cantilever paddles, silicon carbide chuck, silicon carbide kab teeb, nrog rau CVD thiab SiC. TAC coatings.

Cov khoom siv tsuas yog siv nyob rau hauv semiconductor thiab photovoltaic industries, xws li siv lead ua kev loj hlob, epitaxy, etching, ntim, txheej thiab diffusion furnace khoom.

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Product Detail

Khoom cim npe

Kev piav qhia

Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej.

UV-LED-1

UV-LED-2

Lub ntsiab nta

1. Kev kub siab oxidation tsis kam: oxidation kuj tseem zoo heev thaum qhov kub siab tshaj li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.

Main Specifications ntawm CVD-SIC txheej

SiC-CVD Properties
Crystal Structure	FCC β theem
Qhov ntom	g / cm³	3.21
Hardness	Vickers hardness	2500
Loj Loj	ua m	2 ~ 10
Tshuaj Purity	%	99.999 5
Thaum tshav kub kub muaj peev xwm	J·kg-1 · K-1	640
Sublimation kub	℃	2700
Felexural zog	MPa (RT 4-point)	415
Young's Modulus	Gpa (4pt khoov, 1300 ℃)	430
Thermal Expansion (CTE)	10-6K-1	4.5
Thermal conductivity	(W / mK)	300