SemiceraSilicon Carbide Ceramic Txheejyog cov txheej txheem tiv thaiv kev ua haujlwm siab ua los ntawm cov khoom siv tawv heev thiab hnav-resistant silicon carbide (SiC). Cov txheej yog feem ntau tso rau saum npoo ntawm substrate los ntawm CVD lossis PVD txheej txheem nrogsilicon carbide hais, muab tshuaj zoo heev corrosion kuj thiab kub stability. Yog li ntawd, Silicon Carbide Ceramic Txheej yog dav siv nyob rau hauv cov khoom tseem ceeb ntawm semiconductor manufacturing khoom.
Hauv kev tsim khoom semiconductor,SiC txheejtuaj yeem tiv taus qhov kub thiab txias txog li 1600 ° C, yog li Silicon Carbide Ceramic Txheej feem ntau yog siv los ua txheej txheej tiv thaiv rau cov khoom siv lossis cov cuab yeej los tiv thaiv kev puas tsuaj hauv qhov kub thiab txias los yog corrosive ib puag ncig.
Tib lub sijhawm,silicon carbide ceramic txheejtuaj yeem tiv taus qhov yaig ntawm cov kua qaub, alkalis, oxides thiab lwm yam tshuaj reagents, thiab muaj kev tiv thaiv corrosion siab rau ntau yam tshuaj lom neeg. Yog li, cov khoom no yog tsim rau ntau yam corrosive ib puag ncig hauv kev lag luam semiconductor.
Ntxiv mus, piv nrog rau lwm cov ntaub ntawv ceramic, SiC muaj thermal conductivity ntau dua thiab tuaj yeem ua kom sov tau zoo. Qhov no feature txiav txim siab tias nyob rau hauv cov txheej txheem semiconductor uas yuav tsum tau tswj qhov kub thiab txias, siab thermal conductivity ntawmSilicon Carbide Ceramic Txheejpab kom sib sib zog nqus cua sov, tiv thaiv cov cua sov hauv zos, thiab xyuas kom meej tias cov cuab yeej ua haujlwm ntawm qhov kub zoo.
| Basic Physical Properties ntawm CVD sic txheej | |
| Khoom | Tus nqi |
| Crystal Structure | FCC β theem polycrystalline, feem ntau (111) taw qhia |
| Qhov ntom | 3.21 g / cm³ |
| Hardness | 2500 Vickers hardness (500g load) |
| Grain SiZe | 2 ~ 10 hli |
| Tshuaj Purity | 99.99995% |
| Thaum tshav kub kub muaj peev xwm | 6 40j kg-1· K-1 |
| Sublimation kub | 2700 ℃ |
| Flexural zog | 415 MPa RT 4-point |
| Young's Modulus | 430 Gpa 4pt khoov, 1300 ℃ |
| Thermal conductivity | 300 Wm-1· K-1 |
| Thermal Expansion (CTE) | 4.5 × 10-6K-1 |
