Kev piav qhia
Peb lub tuam txhab muabSiC txheejtxheej txheem kev pab cuam nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv los ntawm CVD txoj kev, kom tshwj xeeb gases uas muaj cov pa roj carbon thiab silicon react ntawm kub kom tau high-purity Sic molecules, uas yuav muab tso rau saum npoo ntawm cov ntaub ntawv coated los tsim ib tugSiC tiv thaiv txheejrau epitaxy chim hom hy pnotic.
Lub ntsiab nta
1. Kub oxidation kuj:
oxidation kuj tseem zoo heev thaum kub siab li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.
Main Specifications ntawm CVD-SIC txheej
| SiC-CVD Properties | ||
| Crystal Structure | FCC β theem | |
| Qhov ntom | g / cm³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Loj Loj | ib m | 2 ~ 10 |
| Tshuaj Purity | % | 99.999 5 |
| Thaum tshav kub kub muaj peev xwm | J·kg-1 · K-1 | 640 |
| Sublimation kub | ℃ | 2700 ib |
| Felexural zog | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt khoov, 1300 ℃) | 430 |
| Thermal Expansion (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W / mK) | 300 |
