PSS ua cov cab kuj rau semiconductor wafer kis tau tus mob

Lus piav qhia luv luv:

Silicon carbide yog hom tshiab ntawm ceramics nrog cov nqi siab thiab cov khoom siv zoo heev. Vim muaj cov yam ntxwv zoo li lub zog siab thiab hardness, kub tsis kam, thermal conductivity thiab tshuaj corrosion kuj, Silicon Carbide yuav luag txhua yam tshuaj nruab nrab. Yog li ntawd, SiC tau siv dav hauv kev lag luam roj, tshuaj lom neeg, tshuab thiab airspace, txawm tias lub zog nuclear thiab cov tub rog muaj lawv qhov tshwj xeeb xav tau ntawm SIC. Qee daim ntawv thov ib txwm peb tuaj yeem muab yog lub nplhaib foob rau lub twj tso kua mis, lub valve thiab cov cuab yeej tiv thaiv thiab lwm yam.

Peb tuaj yeem tsim thiab tsim khoom raws li koj qhov tshwj xeeb qhov ntev nrog cov khoom zoo thiab tsim nyog lub sijhawm.

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Product Detail

Khoom cim npe

Product Description

Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej.

Cov yam ntxwv tseem ceeb:

1. Kub oxidation kuj:

oxidation kuj tseem zoo heev thaum kub siab li 1600 C.

2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.

3. Erosion kuj: siab hardness, compact nto, zoo hais.

4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.

Main Specifications ntawm CVD-SIC txheej

SiC-CVD Properties
Crystal Structure	FCC β theem
Qhov ntom	g / cm³	3.21
Hardness	Vickers hardness	2500
Loj Loj	ib m	2 ~ 10
Tshuaj Purity	%	99.999 5
Thaum tshav kub kub muaj peev xwm	J·kg-1 · K-1	640
Sublimation kub	℃	2700 ib
Felexural zog	MPa (RT 4-point)	415
Young's Modulus	Gpa (4pt khoov, 1300 ℃)	430
Thermal Expansion (CTE)	10-6K-1	4.5
Thermal conductivity	(W / mK)	300