PSS Processing Carrier rau Semiconductor Wafer Transmission

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Semicera's PSS Processing Carrier rau Semiconductor Wafer Transmission yog tsim los rau kev tuav tau zoo thiab hloov pauv ntawm cov khoom siv hluav taws xob semiconductor thaum lub sijhawm tsim khoom. Ua los ntawm cov ntaub ntawv zoo, cov cab kuj no ua kom muaj kev sib raug zoo, kev sib kis tsawg, thiab kev thauj mus los yooj yim. Tsim los rau kev lag luam semiconductor, Semicera's PSS cov neeg nqa khoom txhim kho cov txheej txheem kev ua tau zoo, kev ntseeg tau, thiab tawm los, ua rau lawv yog ib qho tseem ceeb hauv kev ua wafer thiab tuav daim ntawv thov.


Product Detail

Khoom cim npe

Product Description

Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej.

Cov yam ntxwv tseem ceeb:

1. Kub oxidation kuj:

oxidation kuj tseem zoo heev thaum kub siab li 1600 C.

2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.

3. Erosion kuj: siab hardness, compact nto, zoo hais.

4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.

Main Specifications ntawm CVD-SIC txheej

SiC-CVD Properties

Crystal Structure

FCC β theem

Qhov ntom

g / cm³

3.21

Hardness

Vickers hardness

2500

Loj Loj

ua m

2 ~ 10

Tshuaj Purity

%

99.999 5

Thaum tshav kub kub muaj peev xwm

J·kg-1 · K-1

640

Sublimation kub

2700 ib

Felexural zog

MPa (RT 4-point)

415

Young's Modulus

Gpa (4pt khoov, 1300 ℃)

430

Thermal Expansion (CTE)

10-6K-1

4.5

Thermal conductivity

(W / mK)

300

Semicera Chaw Ua Haujlwm
Semicera chaw ua haujlwm 2
Cov cuab yeej siv tshuab
CNN ua, tshuaj ntxuav, CVD txheej
Peb qhov kev pabcuam

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