Kev piav qhia
Peb lub tuam txhab muabSiC txheejtxheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, thiaj li hais tias tshwj xeeb gases uas muaj carbon thiab silicon react nyob rau hauv high kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm lubcoatedcov ntaub ntawv, tsim SIC tiv thaiv txheej.
Cov yam ntxwv ntawm SiC da dej taub hau yog raws li nram no:
1. Corrosion tsis kam: SiC cov khoom muaj kev tiv thaiv corrosion zoo heev thiab tuaj yeem tiv taus kev yaig ntawm ntau yam tshuaj kua thiab cov kev daws teeb meem, thiab tsim nyog rau ntau yam kev ua tshuaj thiab kev kho deg.
2. Kub kub stability:SiC nozzlestuaj yeem tswj cov qauv kev ruaj ntseg hauv qhov kub thiab txias ib puag ncig thiab tsim nyog rau cov ntawv thov uas yuav tsum tau kho qhov kub thiab txias.
3. Uniform txau:SiC nozzletsim muaj kev tshuaj tsuag zoo tswj kev ua tau zoo, uas tuaj yeem ua tiav cov kua dej sib xws thiab xyuas kom meej tias cov kua kho mob sib npaug ntawm lub hom phiaj.
4. High hnav tsis kam: SiC cov khoom muaj siab hardness thiab hnav tsis kam thiab tuaj yeem tiv taus kev siv mus ntev thiab kev sib txhuam.
SiC da dej hau tau dav siv hauv cov txheej txheem ua kua hauv kev tsim khoom semiconductor, kev ua tshuaj lom neeg, txheej txheej, electroplating thiab lwm yam kev lag luam. Nws tuaj yeem muab kev ruaj ntseg, zoo ib yam thiab txhim khu kev qha tshuaj tsuag los xyuas kom meej qhov zoo thiab sib xws ntawm kev ua thiab kev kho mob.
Lub ntsiab nta
1. Kub kub oxidation tsis kam:
oxidation kuj tseem zoo heev thaum kub siab li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.
Main Specifications ntawm CVD-SIC txheej
| SiC-CVD Properties | ||
| Crystal Structure | FCC β theem | |
| Qhov ntom | g / cm³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Loj Loj | ua m | 2 ~ 10 |
| Tshuaj Purity | % | 99.999 5 |
| Thaum tshav kub kub muaj peev xwm | J·kg-1 · K-1 | 640 |
| Sublimation kub | ℃ | 2700 ib |
| Felexural zog | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt khoov, 1300 ℃) | 430 |
| Thermal Expansion (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W / mK) | 300 |
