Silicon nitride bonded silicon carbide vaj huam sib luag tsis yooj yim rau deformation

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WeiTai ZogTechnology Co., Ltd.yog lub chaw tsim khoom tshwj xeeb hauv wafer thiab qib siab semiconductor consumables.Peb mob siab rau muab cov khoom lag luam zoo, txhim khu kev qha, thiab cov khoom tshiab rau kev tsim khoom semiconductor,photovoltaic kev lag luamthiab lwm yam kev lag luam.

Peb cov khoom lag luam suav nrog SiC / TaC coated graphite cov khoom thiab cov khoom siv ceramic, suav nrog ntau yam ntaub ntawv xws li silicon carbide, silicon nitride, thiab txhuas oxide thiab lwm yam.

Raws li ib tus neeg muab kev ntseeg siab, peb nkag siab qhov tseem ceeb ntawm cov khoom siv hauv kev tsim khoom, thiab peb tau cog lus tias yuav xa cov khoom uas ua tau raws li cov qauv zoo tshaj plaws kom ua tiav peb cov neeg siv khoom xav tau.

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Silicon nitride ua ke nrog silicon carbide kiln muaj cov yam ntxwv ntawm qhov kub thiab txias, zoo thermal poob siab, yooj yim deformation, oxidation tsis kam, corrosion kuj, thermal conductivity thiab lwm yam.

Main Performance indicators, As

Yam khoom	Firebrick Index	Cov specification	Index ntawm cov khoom zoo li tus
Pom tseeb porosity(%)	<16	<16	<14
Qhov ntom ntom(g/cm3)	22.65 Nws	22.65 Nws	2 2.68 ib
Compressive zog ntawm chav tsev kub(MPa)	2 160	2 170	2 180
Khoov lub zog ntawm chav tsev kub(1 400 X:) MPa	2 40	2 45	2 45
Kub kub dabtsi yog khoov zog(14 00r) MPa	2 50	2 50	2 50
Coefficient ntawm thermal expansion(110 TSI)xioVC	<4.18	<4.18	<4.18
Thermal conductivity(1100C ua)	216	216	216
Refractories(°C )	1800	1800	1800
0.2 MPa siab Softening kub nyob rau hauv load(X:)	1600	1600	> 1700
Ua haujlwm kub siab tshaj plaws(°C)	1550	1550	1550

Cov khoom siv dav siv hauv ceramic sib tsoo log, cov khoom siv aluminium siab, aluminium porcelain pob, muaj kiln, hluav taws xob ceramic, high voltage hluav taws xob plooj (porcelain), huv ware, niaj hnub porcelain, nitride alloy thiab ua npuas ncauj ceramics thiab lwm yam lag luam.