Kev piav qhia
Peb lub tuam txhab muab SiC txheej txheej txheem kev pab cuam los ntawm CVD txoj kev nyob rau saum npoo ntawm graphite, ceramics thiab lwm yam ntaub ntawv, kom tshwj xeeb gases uas muaj carbon thiab silicon react ntawm kub kom tau siab purity SiC molecules, molecules tso rau saum npoo ntawm cov ntaub ntawv coated, tsim SIC tiv thaiv txheej.
Lub ntsiab nta
1. Kev kub siab oxidation tsis kam: oxidation kuj tseem zoo heev thaum qhov kub siab tshaj li 1600 C.
2. High purity: ua los ntawm cov tshuaj vapor deposition nyob rau hauv siab kub chlorination mob.
3. Erosion kuj: siab hardness, compact nto, zoo hais.
4. Corrosion kuj: acid, alkali, ntsev thiab organic reagents.
Main Specifications ntawm CVD-SIC txheej
| SiC-CVD Properties | ||
| Crystal Structure | FCC β theem | |
| Qhov ntom | g / cm³ | 3.21 |
| Hardness | Vickers hardness | 2500 |
| Loj Loj | ib m | 2 ~ 10 |
| Tshuaj Purity | % | 99.999 5 |
| Thaum tshav kub kub muaj peev xwm | J·kg-1 · K-1 | 640 |
| Sublimation kub | ℃ | 2700 ib |
| Felexural zog | MPa (RT 4-point) | 415 |
| Young's Modulus | Gpa (4pt khoov, 1300 ℃) | 430 |
| Thermal Expansion (CTE) | 10-6K-1 | 4.5 |
| Thermal conductivity | (W / mK) | 300 |
